Semiconductor Water Monitoring

Water monitoring plays a crucial role in maintaining the purity of water used in the semiconductor manufacturing process. UPW (ultrapure water) treatment plants, designed to meet specific water quality requirements, often incorporate a series of processes such as degasification, microfiltration, ultrafiltration, ultraviolet (UV) irradiation, and disinfection/sanitation.

The effectiveness of these processes requires continuous monitoring to ensure optimal performance. Various instruments are used to measure contaminant levels including resistivity/conductivity, (dissolved) oxygen, turbidity, redox (oxidation-reduction potential or ORP), pH, total organic carbon (TOC), and specific ions. These measurements provide real-time data on water quality, enabling immediate response to any changes in the water’s purity.

Swan Analytical offers a comprehensive range of instruments specifically designed for the semiconductor market. These instruments provide accurate, reliable measurements of key water quality parameters, ensuring the highest level of purity for semiconductor manufacturing processes.

The Semiconductor Process Steps

Semiconductor Water Monitoring Instruments

DISINFECTANTS

OXYGEN

SILICA

TURBIDITY

CONDUCTIVITY & RESISTIVITY

pH and REDOX (ORP)

SODIUM

TOTAL ORGANIC CARBON (TOC)